Vibrational excitation and negative ion production in radio frequency parallel plate H2 plasmas
β Scribed by P. Diomede; S. Longo; M. Capitelli
- Book ID
- 111627688
- Publisher
- Springer
- Year
- 2005
- Tongue
- English
- Weight
- 462 KB
- Volume
- 33
- Category
- Article
- ISSN
- 1434-6060
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
## Abstract Molecule and particle formation in a capacitively coupled radioβfrequency discharge has been investigated. Formation of molecular ions has been investigated by means of plasma process monitoring employing energydispersive mass spectrometry. Particle growth has been studied by recording
## Abstract Isotope effect on H^β^/D^β^ volume production is studied by measuring both VUV emission and negative ion density in the source. In a double plasma type source, under some discharge conditions, extracted D^β^ currents are nearly the same as H^β^ currents, although VUV emission intensity