VIA-4 high-quality MOSFETs on silicon films prepared by zone melting recrystallization of encapsulated polysilicon on SiO2

✍ Scribed by Geis, M.W.; Tsaur, B.-Y.; Fan, J.C.C.; Silversmith, D.J.; Mountain, R.W.; Donnelly, J.P.; Maby, E.W.; Antoniadis, D.A.

• Book ID: 114593940
• Publisher: IEEE
• Year: 1981
• Tongue: English
• Weight: 182 KB
• Volume: 28
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1981.20584