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Very Precise Thickness Measurement of Thin Films

✍ Scribed by DYSON, J.

Book ID: 109625805
Publisher: Nature Publishing Group
Year: 1963
Tongue: English
Weight: 120 KB
Volume: 197
Category: Article
ISSN: 0028-0836
DOI: 10.1038/1971193a0

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## Abstract In this work we show how to use ellipsometry to measure the thickness of TiW when the film thickness is ≤250 Å. Because the stoichiometry and microstructure of TiW depends strongly on the deposition parameters, the optical constants of TiW deposited in two different systems will not in