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Very low dose ion-implantation effect on heteroepitaxial 3C-SiC mechanical properties

✍ Scribed by Anzalone, R. ;Piluso, N. ;Marino, A. ;Sciuto, A. ;D'Arrigo, G.


Book ID
115561496
Publisher
John Wiley and Sons
Year
2012
Tongue
English
Weight
618 KB
Volume
209
Category
Article
ISSN
0031-8965

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