✦ LIBER ✦

Very high sensitivity ZEP resist using MEK:MIBK developer

✍ Scribed by Shokouhi, B.; Jian Zhang; Bo Cui

Book ID: 114461738
Publisher: The Institution of Engineering and Technology
Year: 2011
Tongue: English
Weight: 264 KB
Volume: 6
Category: Article
ISSN: 1750-0443
DOI: 10.1049/mnl.2011.0548

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