✦ LIBER ✦
Enhanced sensitivity in the electron beam resist poly(methyl methacrylate) using improved solvent developer
✍ Scribed by Mahmood A. Mohsin; John M.G. Cowie
- Book ID
- 107845039
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 806 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0032-3861
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