Very high-density (23 fF//spl mu/m/sup 2/) RF MIM capacitors using high-/spl kappa/ TaTiO as the dielectric

✍ Scribed by Chiang, K.C.; Lai, C.H.; Chin, A.; Wang, T.J.; Chiu, H.F.; Jiann-Ruey Chen, ; McAlister, S.P.; Chi, C.C.

• Book ID: 120419609
• Publisher: IEEE
• Year: 2005
• Tongue: English
• Weight: 274 KB
• Volume: 26
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/LED.2005.856708