VB-2 hydrogenation by ion implantation for VLSI/SOI applications

✍ Scribed by Singh, H.J.; Saraswat, K.C.; Meindl, J.D.

• Book ID: 114595005
• Publisher: IEEE
• Year: 1984
• Tongue: English
• Weight: 316 KB
• Volume: 31
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1984.21877