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Variations of trap states and dangling bonds in CVD Si3N4layer on Si substrate by NH3/SiH4ratio

✍ Scribed by Shizuo Fujita; Hideo Toyoshima; Michinori Nishihara; Akio Sasaki

Book ID: 112823084
Publisher: Springer US
Year: 1982
Tongue: English
Weight: 689 KB
Volume: 11
Category: Article
ISSN: 0361-5235
DOI: 10.1007/bf02672396

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