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Variable angle spectroscopic ellipsometry: A non-destructive characterization technique for ultrathin and multilayer materials

โœ Scribed by John A. Woollam; Paul G. Snyder; Martin C. Rost

Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
337 KB
Volume
166
Category
Article
ISSN
0040-6090

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Spectroscopic Ellipsometry: a Non-destru
Spectroscopic Ellipsometry: a Non-destructive Technique for Surface Analysis
โœ T. Schram; A. Franquet; H. Terryn; J. Vereecken ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 243 KB

New spectroscopic ellipsometry techniques are very promising for the non-destructive surface analysis of thin films on metals. Infrared spectroscopic ellipsometry allows the morphological and chemical characterization of these films, and recent results are presented here.