We presented both laser synthesis and characterization of ultrafine nanometric (12 to 20 nm diameter) Si/C/N powders starting from NH 3 , SiH 4 and C 2 H 2 gas mixture, using a continuous-wave CO 2 laser. The main parameters affecting this process are: the reactant flow ratio R F NH3 =F SiH4 , the C
✦ LIBER ✦
Vapor Phase Synthesis of Multicomponent Si-N-Ti Powders
✍ Scribed by G. Ziegenbalg; U. Šingliar
- Publisher
- John Wiley and Sons
- Year
- 2004
- Tongue
- English
- Weight
- 290 KB
- Volume
- 10
- Category
- Article
- ISSN
- 0948-1907
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