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Vanadocene used as a precursor for the chemical vapor deposition of vanadium carbide at atmospheric pressure

โœ Scribed by L. Poirier; O. Richard; M. Ducarroir; M. Nadal; F. Teyssandier; F. Laurent; O. Cyr-Athis; R. Choukroun; L. Valade; P. Cassoux


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
682 KB
Volume
249
Category
Article
ISSN
0040-6090

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A brief survey of the precursors used for the chemical vapour deposition of the dioxides of titanium, zirconium and hafnium is presented. The review covers precursors used for the closely related process known as atomic layer chemical vapour deposition (ALCVD or ALD). Precursors delivered by standar