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Valence band structure of hydrogenated amorphous silicon-carbon alloys studied by photoelectron spectroscopy

โœ Scribed by Yoshifumi Katayama; Toshikazu Shimada; Keisuke L.I. Kobayashi; Chang-gen Jiang; Hiroshi Daimon; Yoshitada Murata


Publisher
Elsevier Science
Year
1983
Weight
227 KB
Volume
117-118
Category
Article
ISSN
0378-4363

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Laser annealing study of PECVD deposited
โœ U. Coscia; G. Ambrosone; F. Gesuele; V. Grossi; V. Parisi; S. Schutzmann; D.K. B ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 524 KB

The influence of carbon content on the crystallization process has been investigated for the excimer laser annealed hydrogenated amorphous silicon carbon alloy films deposited by Plasma Enhanced Chemical Vapour Deposition (PECVD) technique, using silane methane gas mixture diluted in helium, as well