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Vacuum arrangement for deposition of coatings by sputtering: F T Khomyakova et al (in Russian)

Book ID: 103457372
Publisher: Elsevier Science
Year: 1972
Tongue: English
Weight: 170 KB
Volume: 22
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(72)91043-3

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