1089. Evaluation of equipment for ion-plasma sputtering by electrical discharge pumps: F G Tomashpolskiy et al, elektron tekh radiodetali, 3, 1970, 93–100 (in Russian).

• Book ID: 103453279
• Publisher: Elsevier Science
• Year: 1971
• Tongue: English
• Weight: 150 KB
• Volume: 21
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(71)92250-0