Evacuation of ion-plasma sputtering apparatuses with electrical discharge pumps: F G Tomashpolskiy et al,Elektron Tekh Radiodetal, 3, 1970, 93–100 (in Russian)

• Book ID: 103458400
• Publisher: Elsevier Science
• Year: 1971
• Tongue: English
• Weight: 286 KB
• Volume: 21
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(71)91635-6