UV Lithography and Molding Fabrication of Ultrathick Micrometallic Structures Using a KMPR Photoresist

✍ Scribed by Young-Min Shin; Gamzina, D.; Barnett, L.R.; Yaghmaie, F.; Baig, A.; Luhmann, N.C.

• Book ID: 111858981
• Publisher: IEEE
• Year: 2010
• Tongue: English
• Weight: 645 KB
• Volume: 19
• Category: Article
• ISSN: 1057-7157
• DOI: 10.1109/jmems.2010.2045880