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UV-assisted deposition of TEOS SiO2 films using the spin-coating method

✍ Scribed by Koji Kinashi; Michio Niwano; Nobuo Miyamoto; Koji Honma

Book ID: 103617749
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 385 KB
Volume: 79-80
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(94)90432-4

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