Using a micro-molding process to fabricate polymeric wavelength filters

✍ Scribed by Wei-Ching Chuang; An-Chen Lee; Chi-Ting Ho

• Book ID: 103873731
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 1008 KB
• Volume: 281
• Category: Article
• ISSN: 0030-4018
• DOI: 10.1016/j.optcom.2008.04.019

✦ Synopsis

A procedure for fabricating a high aspect ratio periodic structure on a UV polymer at submicron order using holographic interferometry and molding processes is described. First, holographic interferometry using a He-Cd (325 nm) laser was used to create the master of the periodic line structure on an i-line sub-micron positive photoresist film. A 20 nm nickel thin film was then sputtered on the photoresist. The final line pattern on a UV polymer was obtained from casting against the master mold. Finally, a SU8 polymer was spun on the polymer grating to form a planar waveguide or a channel waveguide. The measurement results show that the waveguide length could be reduced for the waveguide having gratings with a high aspect ratio.