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Application of the inclined exposure and molding process to fabricate a micro beam-splitter with nanometer roughness

✍ Scribed by Yun-Ju Chuang, Shih-Hao Huang, Ying-Chuan Chen, Kuo-Yung Hung


Book ID
120914879
Publisher
Springer-Verlag
Year
2012
Tongue
English
Weight
885 KB
Volume
19
Category
Article
ISSN
0946-7076

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