Using a chromatic-aberration correction system to achieve sub-1.6-nm resolutions of a focused-ion-beam microscope designed for characterization and processing

✍ Scribed by V. A. Zhukov; A. I. Titov; A. V. Zav’yalova

• Book ID: 110214313
• Publisher: Springer
• Year: 2007
• Tongue: English
• Weight: 302 KB
• Volume: 36
• Category: Article
• ISSN: 1063-7397
• DOI: 10.1134/s1063739707050010