Achieving sub-1.6-nm resolutions of a low-voltage microscopic focused-ion-beam system not involving aberration correction

✍ Scribed by V. A. Zhukov

• Book ID: 110214340
• Publisher: Springer
• Year: 2008
• Tongue: English
• Weight: 220 KB
• Volume: 37
• Category: Article
• ISSN: 1063-7397
• DOI: 10.1134/s1063739708020030