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Use of synthetic deformed gratings in Moiré topography

✍ Scribed by Toyohiko Yatagai; Masanori Idesawa


Publisher
Elsevier Science
Year
1977
Tongue
English
Weight
318 KB
Volume
20
Category
Article
ISSN
0030-4018

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Influences of the inclination of grating
✍ Hideo Furuhashi; Lizhong Zhou; Jingnan Liu; Akihito Matsuo; Yoshiyuki Uchida 📂 Article 📅 2002 🏛 John Wiley and Sons 🌐 English ⚖ 201 KB

## Abstract In the lithographic processes of VLSIs, high setting accuracies between masks and wafer are required. The methods using moiré signals obtained by gratings were found to give very high alignment accuracies. In this paper, influences of the inclination of gratings for the alignment accura