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Use of Single-Source, Mixed-Metal Precursors for Chemical Vapor Deposition of Cu-Sn Alloys

✍ Scribed by Doppelt, Pascal; Baum, Thomas H.


Book ID
126906061
Publisher
American Chemical Society
Year
1995
Tongue
English
Weight
339 KB
Volume
7
Category
Article
ISSN
0897-4756

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