Use of silane for the deposition of hard and oxidation resistant Ti–Si–N coatings by a hybrid cathodic arc and chemical vapour process

✍ Scribed by D. Pilloud; J.F. Pierson; P. Steyer; A. Mege; B. Stauder; P. Jacquot

• Book ID: 113790548
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 155 KB
• Volume: 61
• Category: Article
• ISSN: 0167-577X
• DOI: 10.1016/j.matlet.2006.09.046