Use of optical emission intensity to characterize an RF plasma source for MBE growth of GaAsN

✍ Scribed by Jason M Reifsnider; Sridhar Govindaraju; Archie L Holmes Jr.

• Book ID: 108341691
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 167 KB
• Volume: 243
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/s0022-0248(02)01559-2