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Use of glow discharge for ion siliciding and boriding

✍ Scribed by T. Vezhkhon'; Ya. Bogatski; T. Karpin'ski

Publisher
Springer US
Year
1980
Tongue
English
Weight
598 KB
Volume
22
Category
Article
ISSN
0026-0673

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πŸ“œ SIMILAR VOLUMES

Plasma immersion ion implantation of cyl
Plasma immersion ion implantation of cylindrical bore using self-excited radio-frequency glow discharge
✍ C.Z. Gong; Z.T. Zhu; J.W. Shi; S.Q. Yang; X.B. Tian; P.K. Chu πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 532 KB

Plasma immersion ion implantation (PIII) is an effective surface processing technique. However, it is still difficult to implant the inner wall of a cylindrical bore using this technique due to the internal small-volume effect. This paper presents a new approach based on self-excited radio-frequency