Depth profiling of thin surface layers u
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Wagatsuma, Kazuaki
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Article
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1999
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John Wiley and Sons
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English
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A novel technique for accurate in-depth analysis of thin layers is described. Radiofrequency voltages applied to a Grimm-style glow discharge lamp are modulated at a very low frequency, which leads to a reduction in the sputtering rate and variation of the emission signals at the speciรc modulation