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Use of diamond-like carbon films in X-ray optics

✍ Scribed by Kondrashov, P.E.; Smirnov, I.S.; Novoselova, E.G.; Baranov, A.M.

Book ID
122926463
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
749 KB
Volume
6
Category
Article
ISSN
0925-9635

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## Abstract The non‐destructive characterization of intrinsic stress is very important to evaluate the reliability of devices based on diamond‐like carbon (DLC) films. Whereas the only requirement for the X‐ray diffraction method is a crystalline state of specimen, Raman spectroscopic stress analys