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Use of an energetic ion beam on the surface during physical vapor deposition

✍ Scribed by Z.Q. Ma; Y.F. Zheng; D.L. Li

Book ID: 114163987
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 267 KB
Volume: 169
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(00)00025-2

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