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Use of amorphous carbon as a gate insulator for GaAs and related compounds

✍ Scribed by S. Paul; F.J. Clough

Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 120 KB
Volume: 70
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(03)00393-9

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