Use of Al2O3 layer as a dielectric in MOS based radiation sensors fabricated on a Si substrate

✍ Scribed by Ercan Yilmaz; İlker Doğan; Raşit Turan

• Book ID: 108224359
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 217 KB
• Volume: 266
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2008.07.028