Universal expressions for average projected range and average damage depth in ion-implanted substrates

✍ Scribed by Y. Kido; I. Konomi; M. Kakeno; K. Yamada; K. Dohmae; J. Kawamoto

• Book ID: 113277648
• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 486 KB
• Volume: 15
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(86)90248-x