Universal error corrections for finite semiconductor resistivity in cross-Kelvin resistor test structures

✍ Scribed by Holland, A.S.; Reeves, G.K.; Leech, P.W.

• Book ID: 114617441
• Publisher: IEEE
• Year: 2004
• Tongue: English
• Weight: 492 KB
• Volume: 51
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2004.827385