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Uniform deposition in CVD reactors with mounted wafer configuration

✍ Scribed by Jan-Chen Hong; Hong H. Lee

Book ID: 103165838
Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 523 KB
Volume: 71
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(85)90381-1

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