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Unbalanced magnetron ion-assisted deposition and property modification of thin films

✍ Scribed by Savvides, N.

Book ID: 126180060
Publisher: AVS (American Vacuum Society)
Year: 1986
Tongue: English
Weight: 833 KB
Volume: 4
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.573869

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