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Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems

✍ Scribed by Mogensen, Klaus B.; Friis, Peter; Hübner, Jörg; Petersen, Nickolaj; Jørgensen, Anders M.; Telleman, Pieter; Kutter, Jörg P.

Book ID: 115424678
Publisher: Optical Society of America
Year: 2001
Tongue: English
Weight: 118 KB
Volume: 26
Category: Article
ISSN: 0146-9592
DOI: 10.1364/OL.26.000716

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