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Ultrathin Nanoporous Silicon Nitride Membranes for Separations and Biosensing

✍ Scribed by Vlassiouk, Ivan; Apel, Pavel Yu; Dmitriev, Sergey N.; Davenport, Matthew; Healy, Ken; Siwy, Zuzanna S.

Book ID
122014761
Publisher
Biophysical Society
Year
2010
Tongue
English
Weight
56 KB
Volume
98
Category
Article
ISSN
0006-3495

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## Abstract The fabrication and characterization of a metallized nanopore structure for the sensing of single molecules is described. Pores of varying diameters (>10 nm) are patterned into free‐standing silicon nitride membranes by electron‐beam lithography and reactive ion etching. Structural char