Ultrathin Mo/MoN bilayer nanostructure for diffusion barrier application of advanced Cu metallization

✍ Scribed by Bin Zhao; Kefei Sun; Zhenlun Song; Junhe Yang

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 822 KB
• Volume: 256
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2010.03.109