Structural and morphological characteriz
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Yunfeng Hua; Litong Zhang; Laifei Cheng; Wenbin Yang
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Article
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2005
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Elsevier Science
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English
β 251 KB
The deposition of iridium coatings by MOCVD from iridium tris-acetylacetonate without gas reactant is reported. The effects of sublimation temperature of iridium tris-acetylacetonate precursor and types of substrates on iridium coating microstructure and morphology have been investigated at temperat