A monolithic compensated silicon pressur
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D. Otter; S. Ansermet; C. Werner
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Article
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1991
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Elsevier Science
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English
โ 419 KB
A biomedical monolithic compensated pressure and temperature transducer for the ranges 660 to 1160 mmHg and 10 to 50 ยฐC has been developed. It is realized by an application-specific design and a compatible IC/ sensor process. The shape and size constraints associated with mounting in a catheter lead