Ultrasonic micromachining on Al thin film using atomic force microscopy combined quartz crystal resonator

✍ Scribed by Futoshi Iwata; Makoto Kawaguchi; Hisayuki Aoyama; Akira Sasaki

• Book ID: 108389076
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 353 KB
• Volume: 302
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(96)09567-3