✦ LIBER ✦

Ultrapure refractory metals for microelectronic applications

Book ID: 122585220
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 98 KB
Volume: 45
Category: Article
ISSN: 0026-0657
DOI: 10.1016/0026-0657(90)90532-L

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