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Ultralow-k dielectrics prepared by plasma-enhanced chemical vapor deposition

✍ Scribed by Grill, A.; Patel, V.

Book ID: 120086668
Publisher: American Institute of Physics
Year: 2001
Tongue: English
Weight: 338 KB
Volume: 79
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1392976

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