Ultrahigh vacuum apparatus for evaporation of semiconductors and metals by electron beam: G N Gridneva et al,Electron Tekh Materialy, 5, 1970, 131–134 (in Russian)

• Publisher: Elsevier Science
• Year: 1971
• Tongue: English
• Weight: 156 KB
• Volume: 21
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(71)91636-8