1083. Ultrahigh vacuum apparatus for evaporation of semiconductors and metals by electron beam: G N Gridneva et al, elektron tekh materialy, 5, 1970, 131–134 (in Russian).

• Publisher: Elsevier Science
• Year: 1971
• Tongue: English
• Weight: 137 KB
• Volume: 21
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(71)92244-5