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Ultra thin layer activation by implantation of recoil radioactive nuclei: Experiments and simulations

โœ Scribed by L Vincent; T Sauvage; O Lacroix; J Fradin; M Saillard


Book ID
114171940
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
135 KB
Volume
161-163
Category
Article
ISSN
0168-583X

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