Ultra-thin gate dielectrics grown by low-temperature processes for applications to ULSI devices

✍ Scribed by Huey-Liang Hwang; Po-Ching Chen; Klaus Y.J. Hsu

• Book ID: 103618750
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 882 KB
• Volume: 92
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(95)00227-8