✦ LIBER ✦
Deposition of ultra-thin oxide dielectrics for MOSFETs by a combination of low-temperature plasma-assisted oxidation, and intermediate and high-temperature rapid thermal processing
✍ Scribed by G. Lucovsky; V. Misra; S.V. Hattangady; T. Yasuda; J.J. Wortman
- Book ID
- 115990335
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 406 KB
- Volume
- 187
- Category
- Article
- ISSN
- 0022-3093
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