Ultra-thin film and interface analysis of high-k dielectric materials employing Time-Of-Flight Medium Energy Ion Scattering (TOF-MEIS)

✍ Scribed by Primetzhofer, D.; Dentoni Litta, E.; Hallén, A.; Linnarsson, M.K.; Possnert, G.

• Book ID: 122264538
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 623 KB
• Volume: 332
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2014.02.063